Parts Fabrication and Repairs

We adopt a system that monitors parts inventories and integrity tracking.
- Pre-installation of recycled cleaned kits
- Provide PM service on-site if required by customer

- Repair & 2nd source services

  • -  Cryo pumps

  • -  Turbomolecular pumps

  • -  Cooling plates

  • -  DC generator power supply

- Parts Fabrication services

  • -  Ceramic parts

  • -  Quartz parts

  • -  Machine process shields kit