We adopt a system that monitors parts inventories and integrity tracking.
- Pre-installation of recycled cleaned kits
- Provide PM service on-site if required by customer

- Repair & 2nd source services

• -  Cryo pumps

• -  Turbomolecular pumps

• -  Cooling plates

• -  DC generator power supply

- Parts Fabrication services

• -  Ceramic parts

• -  Quartz parts

• -  Machine process shields kit